Facility detail

MKS INSTRUMENTS INC

6 SHATTUCK RD, ANDOVER, MA, 01810

Parent company: NA

Year-over-year total releases

Reported on-site TRI releases in pounds (lbs), grouped by reporting year.

Top chemical totals

The 10 chemicals with the highest cumulative on-site releases in pounds (lbs) across all available years.

Full release table

Rows are years. Columns show the five highest-total chemicals across all years plus each year's total release volume.

All values in pounds (lbs)
Year Freon 113 (CFC-113) Ammonia Total (lbs)
1992 5 5
1990 15,450 5 15,455
1989 22,000 22,000
1988 14,221 14,221

▎ Facilities report to EPA's TRI once they manufacture, process, or use a listed chemical above set thresholds. Once that threshold is crossed, they must report actual releases regardless of size — so a small number reflects genuine low-level discharge, not a data error.