Facility detail

SILFEX INC

950 S FRANKLIN ST, EATON, OH, 45320

Parent company: LAM RESEARCH CORP

Year-over-year total releases

Reported on-site TRI releases in pounds, grouped by reporting year.

Top chemical totals

The 10 chemicals with the highest cumulative on-site releases across all available years.

Full release table

Rows are years. Columns show the five highest-total chemicals across all years plus each year's total release volume.

Year Nitric acid Hydrogen fluoride Total
2024 695 263 958
2023 790 302 1,092
2022 1,290 487 1,777
2021 1,265 462 1,727
2020 1,502 470 1,972
2019 4,200 1,575 5,775
2018 4,048 2,028 6,076
2017 2,542 1,000 3,542
2016 2,194 1,000 3,194
2015 2,250 1,391 3,641
2014 3,327 1,000 4,327
2013 3,368 1,000 4,368
2012 3,282 255 3,537
2011 500 500 1,000
2010 1,049 500 1,549
2009 559 559 1,118
2008 303 219 522
2007 106 106 212
2006 233 233
2005 213 213
2004 106 106
2003 106 106
2002 106 106
2001 250 250
2000 250 250
1999 250 250