Year-over-year total releases
Reported on-site TRI releases in pounds (lbs), grouped by reporting year.
Facility detail
SILFEX INC
1000 TITUS RD, SPRINGFIELD, OH, 45502
Parent company: LAM RESEARCH CORP
Top chemical totals
The 10 chemicals with the highest cumulative on-site releases in pounds (lbs) across all available years.
Full release table
Rows are years. Columns show the five highest-total chemicals across all years plus each year's total release volume.
| All values in pounds (lbs) | ||||||
|---|---|---|---|---|---|---|
| Year | Nitric acid | Hydrogen fluoride | Total (lbs) | |||
| 2024 | 2,289 | 108 | 2,397 | |||
| 2023 | 1,216 | 60 | 1,276 | |||
| 2022 | 3,073 | 172 | 3,245 | |||
| 2021 | 273 | 205 | 478 | |||
| 2020 | 273 | — | 273 | |||
▎ Facilities report to EPA's TRI once they manufacture, process, or use a listed chemical above set thresholds. Once that threshold is crossed, they must report actual releases regardless of size — so a small number reflects genuine low-level discharge, not a data error.