Facility detail

SILFEX INC

1000 TITUS RD, SPRINGFIELD, OH, 45502

Parent company: LAM RESEARCH CORP

Year-over-year total releases

Reported on-site TRI releases in pounds, grouped by reporting year.

Top chemical totals

The 10 chemicals with the highest cumulative on-site releases across all available years.

Full release table

Rows are years. Columns show the five highest-total chemicals across all years plus each year's total release volume.

Year Nitric acid Hydrogen fluoride Total
2024 2,289 108 2,397
2023 1,216 60 1,276
2022 3,073 172 3,245
2021 273 205 478
2020 273 273